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KOH Etching


  1. Etch rates For silicon, silicon nitride, and silicon dioxide in varying concentrations and temperatures of KOH.
  2. Reference: J. Electrochem. Soc. Vol 137, 11, Nov 1990, 3612-3632.

  3. KOH Etching of Silicon 100

  4. KOH Etching of Silicon 110

  5. KOH Etching of Silicon Dioxide and Silicon Nitride

  6. Anisotropic Etch Geometry

  7. Anisotropic Crystalline Etch Simulation (ACES)


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