Oxide Growth Calculator
Time Given Desired Thickness
Calculate
Thickness for a Given Time.
Use an interactive
Color Chart to predict the color of Silicon Oxide or Silicon Nitride at a
particular thickness.
Find information about the
Tube Furnace, which we use to grow thermal oxide.
*Constants and Equations taken from a chapter written by B. E. Deal in
Semiconductor materials and process
technology handbook : for very large scale integration (VLSI) and ultra large
scale integration (ULSI) / edited by Gary E. McGuire. (pp. 48-57)
List of Thermal Oxide Physical Constants
|
Property (units) |
Value |
|
Density (g/cm3) |
2.27 |
|
Dielectric Constant |
3.9 |
|
DC Resistivity @25ºC (Ω-cm) |
1016 |
|
Energy gap (eV) |
~9 |
|
Thermal conductivity (W/cm2ºC) |
0.014 |
|
Linear expansion coefficient (ppm/ºC) |
0.05 |
|
Refractive index |
1.46 |
|
Melting Point (ºC) |
~1700 |
|
Molecular weight |
60.08 |
|
Molecules/cm3 |
2.3*1022 |
|
Specific heat (J/gºC) |
1.0 |
|
Film stress (at 25ºC) dynes/cm2 |
2-4 x 109 |
|
IR absorption peak (mm) |
9.3 |
|
Etch rate BHF (49%) nm/min |
100 |
