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Denton Sputtering System

Denton Sputtering System - Explorer 14
Model No.: Explorer 14
Serial No.: 46841

Manufacturer Information
Denton Vacuum Sputtering Systems


Contact Information:
  Faculty Contact:   Greg Nordin
  Staff Contact:   Jim Fraser
  Student Contact:   Ben Tsai
Maintenance Request for Denton Sputterer



SCHEDULER IS REQUIRED

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  1. Quick Reference

  2. General Description

  3. Operating Instructions

  4. Shutter Installation

  5. Shut Down Instructions

  6. Sputtering Recipe

  7. Cleaning the System

  8. Sputtering Rate

  9. Calculation for Thickness Non-Uniformity

  10. Sputtering Example

  11. Troubleshooting

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