BYU Home page BRIGHAM YOUNG UNIVERSITY  
Search the Cleanroom:
Home   |   Contact   |   Site Map
Cleanroom Home User Resources Equipment Maintenance
Navigation Menu

Cleanroom Home
Photonics Home
Semiconductor Properties
Everything Wafers
Microfabrication Processes
Optical References
Cleanroom Equipment
Safety and Protocol
User Resources
External Links



Equipment Maintenance Requests

Click on the link below to request maintenance for each piece of equipment. Note: you will be required to log in.



General Cleanroom Problems


Karl Suss Aligners


PECVD 1


PECVD 2


Thermal Evaporator


Old E-Beam Evaporator


Denton E-Beam Evaporator


Denton Sputterer


PE2 Etcher


Branson Etcher


Anelva RIE


STS ICP RIE


Trion ICP RIE


RTAs


Metricon Prism Coupler


Critical Point Dryer


Dicing Saw


CMP


Ultratec Polisher
Maintained by ECEn IMMERSE Web Team.
Copyright © 1994-2009. Brigham Young University. All Rights Reserved.