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High Resolution Laser Lithography Tool
DWL 66FS
Heidelberg Instruments Mikrotechnik


Contact Information:
  Faculty Contact:   Aaron Hawkins
  Staff Contact:   Joe Bussio


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Compress All
  1. Mask Writer Information

  2. Operation

  3. Design and Layout Rules

  4. Design Submission and Approval

  5. Completion and Delivery

  6. Billing and Cost (Subject to change)

  7. Example images



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