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Plasma Enhanced Chemical Vapor Deposition (PECVD) 2 Machine
PlasmaLab Model DP800
Serial Number - 8B99198
Plasma Technology, Inc., Massachusetts, USA




Contact Information:
   Faculty Contact:    Aaron Hawkins
   Staff Contact:   Jim Fraser
   Student Contact:   Tom Wall

Maintenance Request for PECVD 2


SCHEDULER IS REQUIRED

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  1. General Description

  2. Operating Instructions

  3. Cleaning Instructions

  4. Process Recipes







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