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Reactive Ion Etcher
Anelva RIE DEM-451
Anelva Corporation


Contact Information:
  Faculty Contact:   Aaron Hawkins
  Staff Contact:   Jim Fraser
  Student Contact:   John Stout

SCHEDULER IS REQUIRED

Maintenance Request for Anelva RIE

WARNINGS
  • Do not operate machine without first having read the instructions (if you want it to work right now and in the future, follow the directions)
  • Do not activate the RF power supply when the etching chamber is at high pressure.
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  1. General Information
  2. Equipment Specifications
  3. Operating Procedure
  4. Quick Reference



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