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STS Multiplex ICP Etch

Surface Technology Systems - Think. Innovate. CREATE STS plc
Imperial Park
Newport
NP10 8UJ, UK
Tel: 44 1633 652400
Fax: 44 1633 652405
webenquiries@stsystems.co.uk
www.stsystems.com

Contact Information:
  Faculty Contact:   Aaron Hawkins
  Staff Contact:   Joe Bussio
  Student Contact:   Ben Tsai

Maintenance Request for STS ICP Etcher

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  1. General Description

  2. STS ICP RIE Overview

  3. Operation Procedure

  4. Shutdown Procedure

  5. Safety Information

  6. Troubleshooting

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