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Thin SU-8 Film Lithography - Curing Images

SU-8 is an epoxy based photoresist.



Experimental Procedure
  1. Wafer Preparation
  2. Spin Coat
  3. Softbake
  4. Exposure
  5. Post Exposure Bake
  6. Development
  7. Curing

Results
Channel Width (um) x Separation (um)CuredNot Cured
2x2
2x8
4x4
4x32

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