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Spin Speed and Thickness

Tables of various photoresists used in the BYU Cleanroom. These tables are rough estimates of photoresist thicknesses obtained at different spin speeds.
NOTE: When changing the thickness of the photoresist layer the appropriate exposure time and developing time will change as well.

AZ 3312

Spin Speed (rpm)Thickness (nm)
10002200
20001550
30001250
40001100
5000950
6000900

AZ 3330

Spin Speed (rpm)Thickness (nm)
10005250
20003700
30003000
40002500
50002300
60002100

Shipley 1.2L

Spin Speed (rpm)Thickness (nm)
20001900
30001590
40001400
50001300
60001200
70001020

Shipley 1.8L

Spin Speed (rpm)Thickness (nm)
20002800
30002300
40002000
50001800
60001620
70001550

SU-8 5

Spin Speed (rpm)Thickness (nm)
10007000
20004000
30003250
40002700
50002400
60002200

SU-8 10

Spin Speed (rpm)Thickness (nm)
1000-
2000-
3000-
4000-
5000-
6000-

SU-8 25

Spin Speed (rpm)Thickness (nm)
100032000
200013000
30009500
40007500
50007000
60006600

nLOF 2020

Spin Speed (rpm)Thickness (nm)
10003400
20002350
30001900
40001700
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