Spin Speed and Thickness

Tables of various photoresists used in the BYU Cleanroom. These tables are rough estimates of photoresist thicknesses obtained at different spin speeds.
NOTE: When changing the thickness of the photoresist layer the appropriate exposure time and developing time will change as well.

AZ 3312

Spin Speed (rpm)	Thickness (nm)
1000	2200
2000	1550
3000	1250
4000	1100
5000	950
6000	900

AZ 3330

Spin Speed (rpm)	Thickness (nm)
1000	5250
2000	3700
3000	3000
4000	2500
5000	2300
6000	2100

Shipley 1.2L

Spin Speed (rpm)	Thickness (nm)
2000	1900
3000	1590
4000	1400
5000	1300
6000	1200
7000	1020

Shipley 1.8L

Spin Speed (rpm)	Thickness (nm)
2000	2800
3000	2300
4000	2000
5000	1800
6000	1620
7000	1550

SU-8 5

Spin Speed (rpm)	Thickness (nm)
1000	7000
2000	4000
3000	3250
4000	2700
5000	2400
6000	2200

SU-8 10

Spin Speed (rpm)	Thickness (nm)
1000	-
2000	-
3000	-
4000	-
5000	-
6000	-

SU-8 25

Spin Speed (rpm)	Thickness (nm)
1000	32000
2000	13000
3000	9500
4000	7500
5000	7000
6000	6600

nLOF 2020

Spin Speed (rpm)	Thickness (nm)
1000	3400
2000	2350
3000	1900
4000	1700