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Trion RIE/ICP - (Trion Technology Minilock Phantom III RIE/ICP)

Contact Information:

  Faculty Contact:   Aaron Hawkins
  Staff Contact:   Jim Fraser
  Student Contact:   Matt Stott

Maintenance Request for Trion ICP



SCHEDULER IS REQUIRED

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  1. General Description
  2. System Overview
  3. Operating Instructions
  4. Tuning Procedure
  5. Tuning a new recipe that does not have an already known tune point.
  6. Cleaning Procedure
  7. Troubleshooting
  8. Common Recipes

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