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Wet Chemical Etching of Metals and Semiconductors


A comprehensive list of etchants for over 50 different metals, semiconductors and cleanroom materials. Some etch rates are given. The ratios are volume ratios unless other units are specified.
  1. Aluminum

  2. Aluminum Gallium Arsenide

  3. Aluminum Trioxide / Alumina / Sapphire

  4. Antimony

  5. Bismuth

  6. Brass

  7. Bronze

  8. Carbon

  9. Chromium

  10. Cobalt

  11. Copper

  12. Epoxies

  13. Gallium Arsenide

  14. Germanium

  15. Gold

  16. Hafnium

  17. Indium

  18. Indium Gallium Arsenide

  19. Indium Gallium Phosphide

  20. Indium Phosphide

  21. Indium Phosphide Oxide Etchants

  22. Indium Tin Oxide (ITO)

  23. Iridium

  24. Iron

  25. Lead

  26. Magnesium

  27. Molybendum

  28. Nickel

  29. Niobium

  30. Palladium

  31. Photoresist (AZ type)

  32. Platinum

  33. Polymer

  34. Polymer

  35. Rhenium, Rhodium and Ruthenium

  36. Silicon

  37. Silicon Dioxide / Quartz / Glass

  38. Silicon Nitride

  39. Silver

  40. Stainless Steel

  41. Tantalum

  42. Tin

  43. Titanium

  44. Tungsten

  45. Vanadium

  46. Zinc

  47. Zinc Oxide

  48. Zirconium





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