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  • Semiconductor Properties
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        • Crystal Plane Intersection Angle Calculator
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      • General Information
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    Calculators & Graphs

    Calculators and graphs useful in semiconductor processing

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    General Information

    Information about cleanrooms, metal thermal properties and more.

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    Etching Resources

    Information on chemical etchants and plasma etching procedures

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    Information on photolithography procedures and materials

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    Optical calculators and charts available for use.

  • Equipment
      • Lithography
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    Lithography

    Equipment specifications for photolithography: aligners, spinners and more.

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    Film Deposition & Growth

    Machines for depositing oxide, nitride and different types of metals.

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    Acid & Base Safety

    Cleanroom gowns are required inside the cleanroom. Other areas of the cleanroom may require further protective equipment.

    NFPA
    The NFPA Diamond

    The NFPA diamond is designed to give general hazard information for chemicals.

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    Wafer Specifications
    Wafer Specifications

    Detailed description of wafer standards and qualities.


    Types of Wafer Substrates

    A wafer after cleanroom fabrication, ready to be processed into individual parts and packaged.

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    Matlab
    MatLab Tutorial

    MatLab is one of the greatest and most helpful tools for doing graphs, filtering data, etc. Learn how to use it by going on the tutorial.


    Related Journals

    Above is a link of several journals related to microfabrication and nanofabrication.

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    Photoresist Manufacturers

    Click on the link above to view Photoresist Manufacturers

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Equipment Maintenance Requests

Click on the link below to request maintenance for each piece of equipment. Note: you will be required to log in.

 

General Cleanroom Problems

Karl Suss Aligners

PECVD 1

PECVD 2

Thermal Evaporator

Old E-Beam Evaporator

Denton E-Beam Evaporator

Denton Sputterer

PE2 Etcher

Branson Etcher

Anelva RIE

STS ICP RIE

Trion ICP RIE

RTAs

Metricon Prism Coupler

Critical Point Dryer

Dicing Saw

CMP

Ultratec Polisher

 

 

 

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        Research Groups

Dr Hawkins - Optofluidics & Photonics

Dr Smalley - Electro-Holography

Dr Schultz - Fiber Sensors

 

  

 

     

 

 

  

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